Iwaki CFD Series Chemical Replenishing Pump

The Iwaki CFD (Chemical Fluid Dispensing) series is a pneumatically driven bellows pump that feeds chemical liquids in precise, repeatable volumes in semiconductor wafer processes. All wet end parts are made of fluoroplastics (PTFE, PFA, PCTFE). The CFD-8T-B delivers 8 mL per shot and the CFD-1T-B delivers 1 mL per shot, both at up to 30 strokes per minute. Mikron Proses (Üsküdar, Istanbul) supplies Iwaki pumps in Turkey and provides application consulting on pump selection.

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For the wider range of Iwaki dosing pumps, see Iwaki chemical metering pumps.

Fluoroplastic construction and discharge setting

The pump is a pneumatic bellows pump powered by compressed air. Its wet ends are PTFE, PFA and PCTFE, with PFA tube connections of 1/4 inch. The discharge volume per stroke is set at the factory (CFD-1T-B: 1 mL, CFD-8T-B: 8 mL) and can be changed within the stated range, 0.4-2.7 mL per shot for the CFD-1T-B and 7-10 mL per shot for the CFD-8T-B. The maximum stroke speed is 30 spm.

Operating conditions

The CFD series is designed for liquid temperatures of 20-60 °C and discharge pressures up to 0.05 MPa. With its low pressure and low stroke speed, it is intended for replenishing duties where repeatability matters more than flow rate. For detailed data, refer to the manufacturer’s datasheet CAT-W 0149-02.

Applications

The series is used for adding chemicals in precise amounts to chemical tanks in wafer cleaning lines (replenishing). The manufacturer’s datasheet lists strong acids, strong alkalis and hydrogen peroxide among the chemicals the fluoroplastic wet ends are compatible with.