Iwaki

Iwaki FA Series Pneumatic Bellows Pumps

Iwaki FA series are PTFE/PFA pneumatic bellows pumps for wafer processing: FA-2E-1 (horizontal) and FA-40VEW (vertical), up to 40 L/min, 5-100 °C liquid temperature.

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Technical specifications

Iwaki FA pneumatic bellows pump, a vertical black cylinder on a base plate with sensor cables

Drive	Pneumatic (compressed air) bellows pump; proximity switch drive system that opens and closes an external air solenoid valve
FA-2E-1	Horizontal type for lower flow; maximum discharge capacity 2 L/min (120 L/h); maximum stroke speed 150 spm; air supply pressure 0.2-0.4 MPa; air consumption 50 NL/min
FA-40VEW	Vertical type for higher flow; maximum discharge capacity 40 L/min (2400 L/h); maximum stroke speed 80 spm; air supply pressure 0.1-0.4 MPa; air consumption 200 NL/min
Liquid temperature	5-100 °C (both models)
Wetted materials	Fluororesin (PTFE / PFA)
Pump connection (suction/discharge)	FA-2E-1: Rc1/8; FA-40VEW: Rc1
Supply air connection	FA-2E-1: Rc1/4; FA-40VEW: Rc3/8
Ambient temperature	0-40 °C
Pump head and bellows	FA-40VEW: pump head and bellows welded into one piece; robust bellows design for continuous operation at higher discharge pressures

Iwaki FA is a series of pneumatic (air-driven) bellows pumps with fluororesin (PTFE/PFA) wetted parts, developed for semiconductor wafer processing and high-purity chemical lines. The series has two standard models: the horizontal FA-2E-1 (2 L/min, 150 spm) and the vertical FA-40VEW (40 L/min, 80 spm). The pumps handle liquids at 5-100 °C and are driven by compressed air with an air supply pressure of up to 0.4 MPa (source: Iwaki F Series catalog F_W0051-13 and FA instruction manual T266-5). Mikron Proses (Üsküdar, Istanbul), the Iwaki distributor in Turkey, supplies the FA series with selection, supply, installation and commissioning.

The FA series belongs to the Iwaki F series of pneumatic bellows pumps and, like the FS and FW/FW-H series, has fluororesin wetted parts.

Two models, two geometries

For single wafer processing, the manufacturer offers the horizontal FA-2E-1, a low-flow pump that is typically used in a spray system. The vertical FA-40VEW is suitable for the batch cleaning of 200/300 mm wafers; it has a robust bellows design for continuous operation at higher discharge pressures and is designed for a long service life. Both models use a proximity switch drive system: the proximity sensors built into the pump open and close an external air solenoid valve. When a dedicated controller is used, the discharge rate can be monitored and controlled easily.

Model	Max. discharge capacity	Max. stroke speed	Air supply pressure	Liquid temperature
FA-2E-1 (horizontal)	2 L/min (120 L/h)	150 spm	0.2-0.4 MPa	5-100 °C
FA-40VEW (vertical)	40 L/min (2400 L/h)	80 spm	0.1-0.4 MPa	5-100 °C

The maximum discharge capacity is given for clear water at 20 °C.

Operating conditions

The wetted parts are made of fluororesin (PTFE/PFA). The manufacturer’s specification gives a liquid temperature of 5-100 °C and an ambient temperature of 0-40 °C. Maximum stroke speed is 150 spm for the FA-2E-1 and 80 spm for the FA-40VEW.

Applications

Spray systems for single wafer processing (FA-2E-1)
Batch cleaning of 200/300 mm wafers (FA-40VEW)

Datasheets and manuals

Documents were last compared with the manufacturer's source on 2026-09-26.

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